Phenomena associated with the adhesion interaction of surfaces have been a critical aspect of micro- and nanosystem development and performance since the first MicroElectroMechanicalSystems(MEMS) were fabricated. These phenomena are ubiquitous in nature and are present in all systems, however MEMS devices are particularly sensitive to their effects owing to their small size and limited actuation force that can be generated. Extension of MEMS technology concepts to the nanoscale and development of NanoElectroMechanicalSystems(NEMS) will result in systems even more strongly influenced by surface forces.
The book is divided into five parts as follows: Part 1: Understanding Through Continuum Theory; Part 2: Computer Simulation of Interfaces; Part 3: Adhesion and Friction Measurements; Part 4: Adhesion in Practical Applications; and
Part 5: Adhesion Mitigation Strategies.
This compilation constitutes the first book on this extremely important topic in the burgeoning field of MEMS/NEMS. It is obvious from the topics covered in this book that bountiful information is contained here covering understanding of surface forces and adhesion as well as novel ways to mitigate adhesion in MEMS/NEMS.
This book should be of great interest to anyone engaged in the wonderful and fascinating field of MEMS/NEMS, as it captures the current R&D activity.
Part 1: Understanding through Continuum Theory
1. Numerical Analysis of
Contact Mechanics between a Spherical Slider and a Flat Disk with Low
Roughness considering LennardJones Surface Forces
2. Equilibrium Vapor
Adsorption and Capillary Force: Exact LaplaceYoung Equation Solution and
Circular Approximation Approaches
3. Which Fractal Parameter Contributes Most
to Adhesion?
4. Effects of Contacting Surfaces on MEMS Device Reliability
5.
A van der Waals Force-Based Adhesion Model for Micromanipulation Part 2:
Computer Simulation of Interfaces
6. Lattice Gas Monte Carlo Simulation of
Capillary Forces in Atomic Force Microscopy
7. Large Scale Molecular Dynamics
Simulations of Vapor Phase Lubrication for MEMS
8. Atomistic Factors
Governing Adhesion between Diamond, Amorphous Carbon and Model Diamond
Nanocomposite Surfaces Part 3: Adhesion and Friction Measurements
9.
Theoretical and Experimental Study of the Influence of AFM Tip Geometry and
Orientation on Capillary Force
10. OddEven Effects in the Friction of
Self-Assembled Monolayers of Phenyl-Terminated Alkanethiols in Contacts of
Different Adhesion Strengths
11. The Pull-Off Force and the Work of Adhesion:
New Challenges at the Nanoscale
12. Interfacial Adhesion between Rough
Surfaces of Polycrystalline Silicon and Its Implications for M/NEMS
Technology
13. Effect of AirPlasma Pre-treatment of Si Substrate on Adhesion
Strength and Tribological Properties of a UHMWPE Film Part 4: Adhesion in
Practical Applications
14. A Review of Adhesion in an Ohmic Microswitch
15.
Characterization of GoldGold Microcontact Behavior Using a Nanoindenter
Based Setup
16. Characterization and Adhesion of Interacting Surfaces in
Capacitive RF MEMS Switches Undergoing Cycling
17. Molecular Mobility and
Interfacial Dynamics in Organic Nano-electromechanical Systems (NEMS) Part 5:
Adhesion Mitigation Strategies
18. Microscale Friction Reduction by Normal
Force Modulation in MEMS
19. Microchannel Induced Surface Bulging of a Soft
Elasto
Kim, Seong H.; Dugger, Michael T.; Mittal, Kash L.
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