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El. knyga: Advances In Multiphysics Simulation And Experimental Testing Of Mems

Edited by (Cornell Univ, Usa), Edited by (Politecnico Di Milano, Italy), Edited by (Politecnico Di Milano, Italy), Edited by (Univ Of Illinois At Urbana-champaign, Usa)
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Microelectromechanical systems (MEMS) and nanoelectromechanical systems (NEMS) may be ubiquitous already, but there is still plenty of room for more, and for better simulation and experimental testing procedures. These 13 extended chapters cover the newest topics in multiphysics simulation and testing, including the challenges in modeling liquid and gas flows in micro/nano devices, using kinetic equations for MEMS and NEMS, applying the direct simulation Monte Carlo method to gas-filled MEMS devices, simulation of micro-fluidics, gas damping in MEMS using fast integral equations solvers, experimental techniques for damping characterization, nonlinear dynamics of the electrostatically actuated MEMS, couple deformation analysis of thin MEMS plates, assessment of Coulomb and Casimir forces, numerical simulation of bioMEMS, continuous modeling of multiphysics problems of Microsystems for topology optimization, mechanical characterization of polysilicon, and testing of nano wires and tubes. Distributed by World Scientific. Annotation ©2008 Book News, Inc., Portland, OR (booknews.com)
Preface v
Challenges in Modeling Liquid and Gas Flows in Micro/Nano Devices
1(36)
M. Gad-el-Hak
Using the Kinetic Equations for MEMS and NEMS
37(44)
C. Cercignani
A. Frezzotti
S. Lorenzani
Applying the Direct Simulation Monte Carlo (DSMC) Method to Gas-Filled MEMS Devices
81(40)
M.A. Gallis
New Approaches for the Simulation of Micro-Fluidics in MEMS
121(32)
T.Y. Ng
H. Li
L.S. Pan
D. Xu
K.Y. Lam
Evaluating Gas Damping in MEMS Using Fast Integral Equation Solvers
153(30)
A. Frangi
W. Ye
J. White
Experimental Techniques for Damping Characterization of Micro and Nanostructures
183(52)
A. Bosseboeuf
H. Mathias
Nonlinear Dynamics of Electrostatically Actuated MEMS
235(52)
S.K. De
N.R. Aluru
Coupled Deformation Analysis of Thin MEMS Plates
287(42)
S. Mukherjee
S. Telukunta
Pull-In Instability in Electrostatically Actuated MEMS due to Coulomb and Casimir Forces
329(46)
R.C. Batra
M. Porfiri
D. Spinello
Numerical Simulation of BioMEMS with Dielectrophoresis
375(24)
G.R. Liu
C.X. Song
Continuous Modeling of Multi-Physics Problems of Microsystems for Topology Optimization
399(28)
G.K. Ananthasuresh
Mechanical Characterization of Polysilicon at the Micro-Scale Through On-Chip Tests
427(28)
A. Corigliano
F. Cacchione
A. Frangi
S. Zerbini
M. Ferrera
Nano-Scale Testing of Nanowires and Carbon Nanotubes Using a Micro-Electro-Mechanical System
455
H.D. Espinosa
Y. Zhu
B. Peng
O. Loh
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