The proceedings of the title symposium, which was held at the 1994 MRS Spring Meeting in San Francisco, include papers based on material studies of film growth, plasmas and deposition techniques, fundamental and defect studies, the role of hydrogen and metastability, optoelectronic properties and transport investigations together with reports on modified band-gap materials and doping studies. The applications represented include the rapidly emerging areas of amorphous silicon solar cells and thin film transistors, as well as more recent advances in image sensing, light emitting diodes and novel devices. Annotation copyright Book News, Inc. Portland, Or.