27 Gecko Feet: Natural Attachment Systems for Smart AdhesionMechanism, Modeling, and Development of Bio-Inspired Materials |
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Bharat Bhushan, Robert A. Sayer |
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1 | |
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27.2.1 Construction of Tokay Gecko |
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2 | |
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27.2.2 Other Attachment Systems |
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5 | |
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27.2.3 Adaptation to Surface Roughness |
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10 | |
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27.3 Attachment Mechanisms |
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12 | |
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27.3.1 Van der Waals Forces |
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12 | |
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27.4 Experimental Adhesion Test Techniques and Data |
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14 | |
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27.4.1 Adhesion Under Ambient Conditions |
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15 | |
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27.4.2 Effects of Temperature |
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17 | |
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27.4.3 Effects of Humidity |
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18 | |
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27.4.4 Effects of Hydrophobicity |
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18 | |
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21 | |
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27.5.2 Single Spring Contact Analysis |
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21 | |
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27.5.3 The Multilevel Hierarchical Spring Analysis |
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23 | |
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27.5.4 Adhesion Results for the Gecko Attachment System Contacting a Rough Surface |
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26 | |
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27.5.5 Capillarity Effects |
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30 | |
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27.5.6 Adhesion Results that Account for Capillarity Effects |
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31 | |
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27.6 Modeling of Biomimetic Fibrillar Structures |
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34 | |
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34 | |
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27.6.2 Single Fiber Contact Analysis |
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34 | |
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35 | |
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27.6.4 Numerical Simulation |
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39 | |
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27.6.5 Results and Discussion |
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41 | |
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27.7 Fabrication of Biomimetric Gecko Skin |
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48 | |
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27.7.1 Single-Level Hierarchical Structures |
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27.7.2 Multilevel Hierarchical Structures |
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53 | |
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55 | |
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56 | |
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59 | |
28 Carrier Transport in Advanced Semiconductor Materials |
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Filippo Giannazzo, Patrick Fiorenza, Vito Raineri |
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63 | |
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28.1 Majority Carrier Distribution in Semiconductors: Imaging and Quantification |
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64 | |
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28.1.1 Basic Principles of SCM |
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64 | |
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28.1.2 Carrier Imaging Capability by SCM |
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67 | |
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28.1.3 Quantification of SCM Raw Data |
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70 | |
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28.1.4 Basic Principles of SSRM |
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78 | |
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28.1.5 Carrier Imaging Capability by SSRM |
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81 | |
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28.1.6 Quantification of SSRM Raw Data |
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81 | |
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28.1.7 Drift Mobility by SCM and SSRM |
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85 | |
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28.2 Carrier Transport Through MetalSemiconductor Barriers by C-AFM |
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88 | |
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28.3 Charge Transport in Dielectrics by C-AFM |
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93 | |
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28.3.1 Direct Determination of Breakdown |
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97 | |
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28.3.2 Weibull Statistics by C-AFM |
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99 | |
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101 | |
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29 Visualization of Fixed Charges Stored in Condensed Matter and Its Application to Memory Technology |
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105 | |
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105 | |
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29.2 Principle and Theory for SNDM |
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106 | |
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29.3 Microscopic Observation of Area Distribution of the Ferroelectric Domain Using SNDM |
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107 | |
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29.4 Visualization of Stored Charac in Semiconductor Hash Memories Using SNDM |
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109 | |
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111 | |
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29.7 SNDM for 3D Observation of Nanoscale Ferroelectric Domains |
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112 | |
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29.8 Next-Generation Ultra-High-Density Ferroelectric Data Storage Based on SNDM |
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114 | |
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29.8.1 Overview of Ferroelectric Data Storage |
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114 | |
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29.8.2 SNDM Nanodomain Engineering System and Ferroelectric Recording Medium |
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116 | |
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29.8.3 Nanodomain Formation in a LiTaO3 Single Crystal |
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117 | |
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29.8.4 High-Speed Switching of Nanoscale Ferroelectric Domains in Congruent Single-Crystal LiTaO3 |
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120 | |
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29.8.5 Prototype of a High-Density Ferroelectric Data Storage System |
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122 | |
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29.8.6 Realization of 10 Tbit/in.2 Memory Density |
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126 | |
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128 | |
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129 | |
30 Applications of Scanning Probe Methods in Chemical Mechanical Planarization |
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Toshi Kasai, Bharat Bhushan |
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131 | |
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30.1 Overview of CMP Technology and the Need for SPM |
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131 | |
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30.1.1 CMP Technology and Its Key Elements |
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131 | |
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30.1.2 Various CMP Processes and the Need for SPM |
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134 | |
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30.2 AFP for the Evaluation of Dishing and Erosion |
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137 | |
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30.3 Surface Planarization and Roughness Characterization in CMP Using AFM |
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141 | |
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30.4 Use of Modified Atomic Force Microscope Tips for Fundamental Studies of CMP Mechanisms |
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144 | |
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149 | |
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149 | |
31 Scanning Probe Microscope Application for Single Molecules in a π-Conjugated Polymer Toward Molecular Devices Based on Polymer Chemistry |
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153 | |
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153 | |
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31.2 Chiral Helical π-Conjugated Polymer |
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154 | |
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31.2.1 Helical Chirality of a π-Conjugated Main Chain Induced by Polymerization of Phenylacetylene with Chiral Bulky Groups |
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156 | |
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31.2.2 Direct Measurement of the Chiral Quaternary Structure in a π-Conjugated Polymer |
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158 | |
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31.2.3 Direct Measurement of Structural Diversity in Single Molecules of a Chiral Helical π-Conjugated Polymer |
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163 | |
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31.2.4 Dynamic Structure of Single Molecules in a Chiral Helical π-Conjugated Polymer by a High-Speed AFM |
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166 | |
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31.3 Supramolecular Chiral π-Conjugated Polymer |
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169 | |
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31.3.1 Simultaneous Imaging of Structure and Fluorescence of a Supramolecular Chiral π-Conjugated Polymer |
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169 | |
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31.3.2 Dynamic Structure of a Supramolecular Chiral π-Conjugated Polymer by a High-Speed AFM |
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177 | |
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181 | |
32 Scanning Probe Microscopy on Polymer Solar Cells |
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Joachim Loos, Alexander Alexeev |
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183 | |
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32.1 Brief Introduction to Polymer Solar Cells |
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184 | |
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32.2 Sample Preparation and Characterization Techniques |
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188 | |
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32.3 Morphology Features of the Photoactive Layer |
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190 | |
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32.3.1 Influence of Composition and Solvents on the Morphology of the Active Layer |
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190 | |
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32.3.2 Influence of Annealing |
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193 | |
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32.3.3 All-Polymer Solar Cells |
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199 | |
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32.4 Nanoscale Characterization of Properties of the Active Layer |
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201 | |
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32.4.1 Local Optical Properties As Measured by Scanning Near-Field Optical Microscopy |
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201 | |
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32.4.2 Characterization of Nanoscale Electrical Properties |
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203 | |
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213 | |
33 Scanning Probe Anodization for Nanopatterning |
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217 | |
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217 | |
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33.2 Electrochemical Origin of SPM-Based Local Oxidation |
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218 | |
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33.3 Variation in Scanning Probe Anodization |
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223 | |
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33.3.1 Patternable Materials in Scanning Probe Anodization |
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223 | |
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33.3.2 Environment Control in Scanning Probe Anodization |
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226 | |
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33.3.3 Electrochemical Scanning Surface Modification Using Cathodic Reactions |
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229 | |
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33.4 Progress in Scanning Probe Anodization |
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232 | |
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33.4.1 From STM-Based Anodization to AFM-Based Anodization |
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232 | |
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33.4.2 Versatility of AFM-Based Scanning Probe Anodization |
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233 | |
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33.4.3 In Situ Characterization of Anodized Structures by AFM-Based Methods |
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233 | |
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33.4.4 Technical Development of Scanning Probe Anodization |
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237 | |
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33.5 Lithographic Applications of Scanning Probe Anodization |
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239 | |
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33.5.1 Device Prototyping |
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239 | |
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33.5.2 Pattern Transfer from Anodic Oxide to Other Materials |
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240 | |
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33.5.3 Integration of Scanning Probe Lithography with Other High-Throughput Lithographies |
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247 | |
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33.5.4 Chemical Manipulation of Nano-objects by the Use of a Nanotemplate Prepared by Scanning Probe Anodization |
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248 | |
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251 | |
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251 | |
34 Tissue Engineering: Nanoscale Contacts in Cell Adhesion to Substrates |
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Mario D'Acunto, Paolo Giusti, Franco Maria Montevecchi, Gianluca Ciardelli |
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257 | |
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34.1 Tissue Engineering: A Brief Introduction |
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257 | |
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34.2 Fundamental Features of Cell Motility and CellSubstrates Adhesion |
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261 | |
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34.2.1 Biomimetic Scaffolds, Roughness, and Contact Guidance for Cell Adhesion and Motility |
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268 | |
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34.3 Experimental Strategies for CellECM Adhesion Force Measurements |
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271 | |
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279 | |
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279 | |
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280 | |
35 Scanning Probe Microscopy in Biological Research |
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Tatsuo Ushiki, Kazushige Kawabata |
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285 | |
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285 | |
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35.2 SPM for Visualization of the Surface of Biomaterials |
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286 | |
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35.2.1 Advantages of AFM in Biological Studies |
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286 | |
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35.2.2 AFM of Biomolecules |
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287 | |
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35.2.3 AFM of Isolated Intracellular and Extracellular Structures |
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289 | |
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35.2.4 AFM of Tissue Sections |
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292 | |
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35.2.5 AFM of Living Cells and Their Movement |
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292 | |
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35.2.6 Combination of AFM with Scanning Near-Field Optical Microscopy for Imaging Biomaterials |
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294 | |
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35.3 SPM for Measuring Physical Properties of Biomaterials |
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296 | |
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35.3.1 Evaluation Methods of Viscoelasticity |
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35.3.2 Examples for Viscoelasticity Mapping Measurements |
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299 | |
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35.3.3 Combination of Viscoelasticity Measurement with Other Techniques |
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302 | |
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35.4 SPM as a Manipulation Tool in Biology |
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304 | |
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36 Novel Nanoindentation Techniques and Their Applications |
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309 | |
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36.2 Basic Principles of Contact |
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311 | |
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36.2.2 Elastic Contact Solution |
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312 | |
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36.3 Tip Rigidity and Geometry |
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313 | |
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36.4 Hardness and Modulus Measurements |
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314 | |
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36.4.2 Practical Application Aspects |
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316 | |
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36.4.3 Recent Applications |
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320 | |
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36.5 Yield Stress and Modulus Measurements |
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324 | |
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36.5.2 Recent Applications |
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326 | |
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36.6 Work-Hardening Rate and Exponent Measurements |
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329 | |
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36.6.2 Practical Application Aspects |
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333 | |
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36.6.3 Recent Applications |
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335 | |
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36.7 Viscoelastic Compliance and Modulus |
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336 | |
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36.7.2 Practical Application Aspects |
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339 | |
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36.8 Other Mechanical Characteristics |
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342 | |
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37 Applications to Nano-Dispersion Macromolecule Material Evaluation in an Electrophotographic Printer |
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347 | |
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37.2 Electrophotographic Processes |
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348 | |
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37.2.1 Principle and Characteristics of an Electrophotographic System |
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348 | |
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37.2.2 Microcharacteristic and Analysis Technology for Functional Components |
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349 | |
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37.3 SPM Applications to Electrophotographic Systems |
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352 | |
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37.3.1 Measurement of Electrostatic Charge of Toner |
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352 | |
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37.3.2 Measurement of the Adhesive Force Between a Particle and a Substrate |
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353 | |
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37.3.3 Observation of a Nanodispersion Macromolecule Interface Toner Adhesion to a Fusing Roller |
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355 | |
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37.4 Current Technology Subjects |
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357 | |
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357 | |
38 Automated AFM as an Industrial Process Metrology Tool for Nanoelectronic Manufacturing |
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Tianming Bao, David Fong, Sean Hand |
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359 | |
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359 | |
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38.2 Dimensional Metrology with AFM |
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361 | |
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38.2.1 Dimensional Metrology |
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361 | |
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38.2.2 AFM Scanning Technology |
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362 | |
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38.2.3 AFM Probe Technology |
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367 | |
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38.2.4 AFM Metrology Capability |
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367 | |
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38.3 Applications in Semiconductors Logic and Memory Integrated Circuits |
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370 | |
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38.3.1 Shallow Trench Isolation Resist Pattern |
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370 | |
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372 | |
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38.3.4 Gate Resist Pattern |
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378 | |
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38.3.6 FinFET Gate Formation |
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383 | |
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38.3.7 Gate Sidewall Spacer |
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385 | |
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38.3.8 Strained SiGe Source/Drain Recess |
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385 | |
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38.3.9 Pre-metal Dielectric CMP |
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386 | |
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38.3.10 Contact and Via Photo Pattern |
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387 | |
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387 | |
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389 | |
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38.3.13 Metal Trench Photo Pattern |
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390 | |
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38.3.14 Metal Trench Etch |
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390 | |
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392 | |
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38.3.18 LWR, LER, and SWR |
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397 | |
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38.3.19 DRAM DT Capacitor |
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397 | |
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38.3.20 Ferroelectric RAM Capacitor |
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398 | |
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38.3.21 Optical Proximity Correction |
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398 | |
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38.4 Applications in Photomask |
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399 | |
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38.4.1 Photomask Pattern and Etch |
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399 | |
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38.4.2 Photomask Defect Review and Repair |
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400 | |
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38.5 Applications in Hard Disk Manufacturing |
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401 | |
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38.5.1 Magnetic Thin-Film Recording Head |
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401 | |
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38.5.2 Slider for Hard Drive |
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405 | |
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38.6 Applications in Microelectromechanical System Devices |
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406 | |
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38.6.1 Contact Image Sensor |
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406 | |
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38.6.2 Digital Light Processor Mirror Device |
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408 | |
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38.7 Challenge and Potential Improvement |
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408 | |
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409 | |
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411 | |
Subject Index |
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