Preface |
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xi | |
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1 | (16) |
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1.1 Why "Quantitative" Scanning Probe Microscopy? |
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1 | (4) |
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2 | (2) |
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1.1.2 Available Numerical Techniques |
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4 | (1) |
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1.2 What is Scanning Probe Microscopy? |
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5 | (4) |
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1.3 Basic Metrology Concepts |
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9 | (3) |
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1.3.1 Measurement Traceability |
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9 | (2) |
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1.3.2 Measurement Uncertainty |
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11 | (1) |
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1.4 Scanning Probe Microscopy and Quantitative Measurements |
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12 | (5) |
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Chapter 2 Instrumentation Principles |
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17 | (18) |
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2.1 Few Components for the Price of a House? |
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17 | (8) |
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17 | (5) |
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22 | (1) |
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2.1.3 Interaction Sensing Element & Feedback Loop |
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23 | (1) |
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24 | (1) |
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2.1.5 Vibration Isolation |
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24 | (1) |
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25 | (10) |
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2.2.1 More Accurate Instruments |
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26 | (1) |
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2.2.2 Larger Range Measurements |
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27 | (2) |
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2.2.3 Faster Measurements |
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29 | (6) |
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35 | (20) |
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3.1 From Analog to Digital |
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35 | (1) |
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3.2 Data Acquisition Basics |
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35 | (5) |
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35 | (2) |
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3.2.2 Feedback Loop Effects |
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37 | (3) |
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40 | (3) |
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40 | (1) |
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41 | (2) |
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43 | (2) |
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3.5 Mechanical and Thermal Drifts |
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45 | (5) |
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50 | (2) |
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52 | (1) |
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52 | (3) |
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Chapter 4 Basic Data Processing |
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55 | (26) |
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55 | (2) |
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56 | (1) |
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57 | (1) |
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4.3 Local Data Manipulation |
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58 | (2) |
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58 | (1) |
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59 | (1) |
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4.4 Global Data Manipulation |
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60 | (13) |
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4.4.1 Resampling and Interpolation |
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61 | (3) |
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4.4.2 Data Leveling and Background Extraction |
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64 | (3) |
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4.4.3 Fourier Transform Filtering |
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67 | (2) |
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69 | (4) |
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4.5 Multiple Channel Operations |
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73 | (1) |
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74 | (1) |
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74 | (3) |
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4.8 Other Freely Available Data Processing Software |
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77 | (1) |
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77 | (1) |
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78 | (1) |
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78 | (1) |
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78 | (1) |
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78 | (3) |
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Chapter 5 Dimensional Measurements |
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81 | (46) |
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5.1 The Easiest Measurement? |
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81 | (1) |
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5.2 Atomic Force Microscopy Principles |
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82 | (6) |
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84 | (1) |
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84 | (4) |
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5.3 Atomic Force Microscopy Dimensional Data Measurement and Evaluation |
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88 | (11) |
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5.3.1 Direct Dimensional Quantities |
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89 | (1) |
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5.3.2 Statistical Quantities |
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89 | (10) |
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5.4 Atomic Force Microscopy and Quantitative Dimensional Metrology |
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99 | (22) |
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5.4.1 International Documentary Standards for Scanning Probe Microscopy |
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99 | (1) |
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5.4.2 Dimensional Calibrations by Scanning Probe Microscope |
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100 | (1) |
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5.4.3 Ensuring Traceability: Transfer Standards for Scanning Probe Microscopes |
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101 | (3) |
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5.4.4 Calibration of the Vertical Axis with Step Height Standards |
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104 | (2) |
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5.4.5 Calibration of the Two Lateral Axes with Lateral Standards |
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106 | (1) |
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5.4.6 Alternative Calibration of all Three Axes with 3D Pyramidal Standards |
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106 | (2) |
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5.4.7 Uncertainties in Dimensional Measurements |
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108 | (2) |
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5.4.8 Positioning System Systematic Errors |
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110 | (2) |
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5.4.9 Positioning System Short and Long Time Instability |
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112 | (1) |
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5.4.10 Tip-Sample Convolution Effects |
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112 | (9) |
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121 | (1) |
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122 | (1) |
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122 | (5) |
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Chapter 6 Force and Mechanical Properties |
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127 | (46) |
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6.1 What About Forces in Force Microscopy? |
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127 | (1) |
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6.2 Forces and Force-Distance Curves |
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128 | (14) |
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6.2.1 Short Range Repulsive Forces and Contact Theories |
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131 | (6) |
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6.2.2 Van der Waals Forces |
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137 | (1) |
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6.2.3 Electrostatic Forces |
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138 | (2) |
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140 | (1) |
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140 | (2) |
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142 | (1) |
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6.3 Force Interaction Modeling |
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142 | (8) |
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6.3.1 Quantum Nanoscale Modeling |
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143 | (4) |
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6.3.2 Classical Nanoscale Modeling |
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147 | (2) |
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6.3.3 Mesoscopic Modeling |
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149 | (1) |
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149 | (1) |
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6.4 Quantitative Force Measurements |
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150 | (11) |
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6.4.1 Cantilever Stiffness Calibration |
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151 | (6) |
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6.4.2 Force-Distance Curves Interpretation and Artifacts |
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157 | (3) |
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6.4.3 Alternative Approaches |
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160 | (1) |
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6.5 Local Mechanical and Material Properties Mapping |
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161 | (6) |
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161 | (1) |
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162 | (1) |
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163 | (4) |
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167 | (1) |
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168 | (5) |
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168 | (5) |
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Chapter 7 Friction and Lateral Forces |
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173 | (18) |
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7.1 What Opposes the Tip Motion? |
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173 | (1) |
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174 | (5) |
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7.3 Friction Force Modeling |
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179 | (1) |
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7.4 Quantitative Friction Force Measurements |
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179 | (6) |
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7.4.1 Lateral Force Sensor Calibration |
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179 | (4) |
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7.4.2 Friction Force Measurements Data Artifacts |
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183 | (2) |
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185 | (1) |
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7.5.1 Independent Friction Measurement |
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185 | (1) |
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7.5.2 Torsional Resonance Microscopy |
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185 | (1) |
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186 | (1) |
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186 | (5) |
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187 | (4) |
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Chapter 8 Electrostatic Fields |
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191 | (16) |
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8.1 What is Above the Sample? See the Invisible! |
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191 | (2) |
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193 | (3) |
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196 | (2) |
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198 | (1) |
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8.5 Quantitative Data Interpretation |
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199 | (3) |
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200 | (1) |
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201 | (1) |
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202 | (1) |
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203 | (4) |
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Chapter 9 Magnetic Fields |
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207 | (14) |
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9.1 Magnetic Fields Measurements |
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207 | (1) |
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208 | (3) |
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211 | (1) |
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212 | (3) |
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215 | (2) |
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217 | (1) |
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217 | (1) |
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218 | (3) |
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Chapter 10 Local Current Measurements |
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221 | (26) |
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10.1 Where it All Started |
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221 | (1) |
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10.2 Tip-Sample Junction Models |
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222 | (3) |
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10.3 Scanning Tunneling Microscopy and Related Methods |
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225 | (6) |
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10.3.1 Interaction Models |
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226 | (2) |
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10.3.2 Numerical Modeling |
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228 | (1) |
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229 | (1) |
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10.3.4 Data Interpretation |
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229 | (2) |
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10.4 Conductive Atomic Force Microscopy |
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231 | (11) |
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232 | (1) |
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233 | (2) |
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235 | (1) |
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10.4.4 Data Interpretation |
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235 | (7) |
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242 | (1) |
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243 | (4) |
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243 | (4) |
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Chapter 11 Thermal Measurements |
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247 | (18) |
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247 | (1) |
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11.2 Nano- and Microscale Heat Flow |
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248 | (7) |
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248 | (2) |
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250 | (1) |
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250 | (1) |
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11.2.4 Heat Sources in Scanning Probe Microscope |
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251 | (1) |
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11.2.5 Tip-Sample Models of Heat Transfer |
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252 | (2) |
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11.2.6 Modeling Approaches |
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254 | (1) |
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255 | (2) |
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11.3.1 Available Techniques |
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255 | (1) |
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11.3.2 Development Approaches |
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256 | (1) |
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257 | (5) |
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11.4.1 Artifacts Treatment |
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258 | (4) |
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262 | (1) |
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263 | (1) |
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263 | (2) |
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Chapter 12 Optical Measurements |
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265 | (30) |
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12.1 Have a Look at Nanoscale |
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265 | (1) |
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12.2 Fundamental Phenomena |
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266 | (2) |
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268 | (2) |
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269 | (1) |
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12.3.2 Apertureless SNOM and TERS |
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270 | (1) |
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270 | (5) |
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12.4.1 Classical Electrodynamics |
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270 | (2) |
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12.4.2 Finite Difference in Time Domain modeling |
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272 | (3) |
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12.5 Quantitative Measurements |
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275 | (15) |
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12.5.1 Instrument Calibration |
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276 | (1) |
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12.5.2 Artifacts and Uncertainty Sources |
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276 | (10) |
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12.5.3 Quantitative Data Interpretation---Image Modeling |
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286 | (4) |
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290 | (1) |
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290 | (5) |
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Chapter 13 Sample Data Files |
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295 | (2) |
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13.1 Morphology, Tip-Sample Artifacts, etc |
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296 | (1) |
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13.2 Mechanical Properties |
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296 | (1) |
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13.3 Electric and Magnetic Properties |
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296 | (1) |
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296 | (1) |
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296 | (1) |
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Chapter 14 Numerical Modeling Techniques |
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297 | (22) |
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14.1 Density Functional Theory |
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298 | (3) |
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14.1.1 Example: Quantum Espresso |
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300 | (1) |
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301 | (1) |
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14.2 Classical Molecular Dynamics |
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301 | (4) |
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305 | (1) |
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305 | (1) |
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14.3 Dislocation Dynamics |
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305 | (3) |
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14.3.1 Example: MicroMegas |
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308 | (1) |
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308 | (1) |
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14.4 Finite Difference Method |
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308 | (3) |
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311 | (1) |
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14.5 Finite Element Method |
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311 | (1) |
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311 | (1) |
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312 | (1) |
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14.6 Finite Difference in Time Domain Method |
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312 | (7) |
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315 | (1) |
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315 | (4) |
Index |
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319 | |