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1 Science and Technology in the Twenty-First Century |
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1.1 Trend of Science and Technology in the Twenty-First Century |
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1.2 Previous Prospect in SPM Roadmap 2000 and the State-of-the-Art |
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1.3.1 Roadmap from Both Sides of Seeds and Needs |
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1.3.2 Various Directions of SPM Roadmap |
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2 Scanning Tunneling Microscopy |
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2.1 Basic Principle of Scanning Tunneling Microscopy |
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2.3 Present States and Unsettled Issues |
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2.4.1 Further STM Combination with Other Microscopies and Spectroscopies |
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2.4.2 Miniaturized, Multi-, and Intelligent STM |
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2.4.3 Well-Defined Tips and Hybrid Tips |
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2.4.4 Evolution of STM Utilizing Phase of Tunneling Electron and Ballistic Electron |
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3 Atomic Force Microscopy |
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3.3 Present Situation and Issues |
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3.4.1 Development of New Force Spectroscopy |
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3.4.2 Development of AFM Imaging Operating in Special Environments |
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3.4.3 Development of Imaging Method Under the Surface |
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4 -Near-Field Scanning Optical Microscope |
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4.2 Progress in Fundamental Performance of NSOM |
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4.3 Current State of NSOM |
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4.3.2 Operation Environment |
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4.3.3 Near-Field Optical Spectroscopy |
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4.4.1 Enhancement of Spatial Resolution |
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4.4.3 Extension of NSOM Operation Wavelength |
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4.4.4 Nanoscale LightMatter Interaction |
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5 Scanning Capacitance Microscope |
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5.2 Practical Dopant Profiling by SCM |
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5.3 Other SPMs for Dopant Profiling |
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6 Electrostatic Force Microscopy |
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Masakazu Nakamura and Hirofumi Yamada |
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6.2 Present State and Problems |
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7 Magnetic Force Microscope |
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7.1 Principle of MFM [ 1,2] |
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7.1.1 Estimated Resolution of MFM |
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7.1.2 Detectable Sensitivity of MFM |
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7.3 MFM Applications to Magnetic Recording Media |
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7.3.1 Observation of Ultrahigh Density Perpendicular Magnetic Recording |
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7.3.2 Evaluation of Recording Property in High Density Magnetic Recording |
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8 STM-Induced Photon Emission Spectroscopy |
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8.2.1 ElectronHole Recombination Radiation |
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8.2.2 Surface Plasmon Emission |
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8.3 History of Research and Development |
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8.4 Present Situation and Issues |
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8.5.1 Equipment Performance |
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9.1 What is the Scanning Atom Probe? |
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9.2 Mass Analysis of Nonmetallic Specimens by the SAP |
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9.3 Present State and Problems |
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10 Chemical Discrimination of Atoms and Molecules |
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Komeda Tadahiro, Seizo Morita and Yauhiro Sugawara |
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10.1 Recognition of Atom and Molecules; Inelastic Tunneling Spectroscopy |
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10.2 Chemical Identification of Atoms by AFM |
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10.2.1 Chemical Identification of Atom Species by AFM |
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10.3.1 Recognition of Atom and Molecules; Inelastic Tunneling Spectroscopy |
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10.3.2 Future Prospect of Chemical Identification of Atoms by AFM |
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11 Manipulation of Atoms and Molecules |
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Tadahiro Komeda, Seizo Morita, Shukichi Tanaka and Hirofumi Yamada |
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11.1 Manipulation of Atoms and Molecules: With the Use of STM Through Vibrational Excitation of Molecules |
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11.2 Manipulation of Atoms and Molecules by AFM |
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11.2.1 Atom Manipulation by AFM |
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11.2.2 AFM Manipulation of Organic Molecules |
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11.3.1 Manipulation of Atoms and Molecules: with the Use of STM Electrons |
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11.3.2 Future Prospect of Atom Manipulation by AFM |
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11.3.3 Future Prospect of AFM Manipulation of Organic Molecules |
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12 Multiprobe SPM |
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13 AFM Measurement in Liquid |
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13.1 Demand for AFM Imaging in Liquid |
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13.2 Dynamic Mode AFM Imaging in Liquid |
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13.2.1 AM-AFM and Q-Control Method |
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13.2.2 High-Resolution Imaging by FM-AFM |
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13.3.1 Force Sensitivity Improvement |
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13.3.2 Spurious Peaks in Oscillation Spectrum |
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13.3.3 High-Resolution Imaging of a Sample Having Large Height Variations |
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13.4.1 High-Speed FM-AFM Imaging |
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13.4.2 Charge Density Mapping in Liquid |
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13.4.3 Mapping of Three-Dimensional Solvation Structure |
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14 High-Speed SPM |
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14.1 Optimization of AFM Devices for High-Speed Scanning |
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14.1.1 Scanner and Related Devices |
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14.1.2 Cantilevers and Related Devices |
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14.1.3 Feedback Control and Related Techniques |
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14.2 World Trends in the High-Speed SPM |
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15 Scanning Nonlinear Dielectric Microscope |
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15.1 Principle and Theory for SNDM |
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15.2 Microscopic Observation of Area Distribution of Ferroelectric Domain Using SNDM |
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15.3 Visualization of Stored Charge in Semiconductors Using SNDM |
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15.4 SNDM Ferroelectric Probe Memory |
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16 SPM Coupled with External Fields |
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Ken Nakajima and Tadahiro Komeda |
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16.1 Light-Illumination STM |
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16.2 Coupling with Outer Field; Electron Spin Resonance Detection using STM |
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17 Probe Technology |
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17.2 Carbon Nanotube Probe |
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18 Characterization of Semiconducting Materials |
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Shuji Hasegawa and Masahiko Tomitori |
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18.1 Characterization of Semiconductor Surfaces |
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18.2 Characterization of Semiconductor Interfaces |
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18.3 Characterization and Manipulation of Semiconductor Nanostructures |
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18.4 Characterization of Defects in Semiconductors |
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18.5 Characterization of Semiconductor Processes |
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19 Evaluation of SPM for LSI Devices |
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Koji Usuda, Takashi Furukawa and Yasushi Kadota |
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19.1 LSI Devices and Forecast |
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19.1.1 Development of Si-LSI Devices |
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19.1.2 Forecast of Si-LSI Devices |
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19.2 Present Evaluation Technologies of LSI Devices and Latest Trend of SPM Characterization |
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19.2.1 LSI Device Evaluation Technology |
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19.2.2 Latest Trend of SPM Evaluations |
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19.2.3 New Evaluation with Advanced SPM Technology |
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20 SPM Characterization of Catalysts |
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21 SPM Characterization of Biomaterials |
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Atsushi Rai and Rehana Afrin |
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21.1.1 Present Status of Nanoprobetechnology in Bioscience |
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21.2.1 Nanoprobetechnology in Biotechnology |
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21.3.1 Nanoprobetechnology in Biological Field |
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22 SPM Characterization of Organic and Polymeric Materials |
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Shukichi Tanaka and Ken Nakajima |
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22.1 Characterization of Organic Materials |
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22.2 Characterization of Polymeric Materials |
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23 Theories of SPM |
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Masaru Tsukada and Shin-ya Hasegawa |
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23.1 Present Status of Theories of STM |
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23.2 Present Status of the Theory for AFM |
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23.3 Development of SPM Simulator |
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23.3.1 Hierarchical Tip and Sample Model |
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23.3.2 STM Simulation for the Decorated Tip |
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23.3.3 Theoretical Simulation Method for the Dynamic AFM in Liquid |
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23.3.4 SPM Simulation for Organic and Protein Molecules |
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23.4 Present Status and Problems with Theories and Simulations of NSOM |
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24 When Will SPM Realize Our Dreams? The Roadmap of SPM |
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Index |
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